Electron-silane scattering cross section for plasma assisted processes

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dc.contributor.authorVerma, Pankaj
dc.contributor.authorKaur, Jaspreet
dc.contributor.authorAntony, Bobby
dc.date.accessioned2018-06-22T11:19:37Z
dc.date.available2018-06-22T11:19:37Z
dc.date.issued2017
dc.identifier.citationPhysics of Plasmas,2017,V.24,P.033501-1-9en_US
dc.identifier.otherhttp://dx.doi.org/10.1063/1.4976833
dc.identifier.urihttp://hdl.handle.net/123456789/1329
dc.language.isoenen_US
dc.publisherAmerican Institute of Physicsen_US
dc.subjectSilaneen_US
dc.subjectElectron impact cross sectionsen_US
dc.subjectElectron scatteringen_US
dc.subjectSCOP formalismen_US
dc.subjectSCIEen_US
dc.titleElectron-silane scattering cross section for plasma assisted processesen_US
dc.typeArticleen_US
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