Enhancing the dynamic range of mems pressure sensor by optimization of design parameters

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Date
2017-01
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Publisher
Indian Institute of Technology (Indian School of Mines), Dhanbad
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Description
Keywords
Design parameters, Mems pressure sensor, Gauge pressure, Piezoelectric pressure sensor, Diaphragm mechanics, ECE, Ph.D
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http://hdl.handle.net/123456789/876
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S.K. Raghuwanshi