Synthesis and characterization of thin films for micro- electro-mechanical-system devices

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dc.contributor.authorSharma, Nagesh
dc.date.accessioned2020-08-28T07:30:04Z
dc.date.available2020-08-28T07:30:04Z
dc.date.issued2020-06
dc.identifier.urihttp://hdl.handle.net/123456789/1741
dc.language.isoenen_US
dc.publisherIndian Institute of Technology (Indian School of Mines), Dhanbaden_US
dc.subjectMicroelectromechanical systemsen_US
dc.subjectLow pressure chemical vapor depositionen_US
dc.subjectMIM capacitoren_US
dc.subjectAPHen_US
dc.subjectPH1550en_US
dc.subjectPh.Den_US
dc.subjectplasma enhance chemical vapor deposition (PECVD) systems
dc.titleSynthesis and characterization of thin films for micro- electro-mechanical-system devicesen_US
dc.typeThesisen_US
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