Development of hard optically transparent hydrophobic nanocomposite Al-Si-N coatings by magnetron sputtering

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dc.contributor.authorSoni
dc.date.accessioned2021-03-31T04:43:49Z
dc.date.available2021-03-31T04:43:49Z
dc.date.issued2021-03
dc.identifier.urihttp://hdl.handle.net/123456789/1959
dc.language.isoenen_US
dc.publisherIndian Institute of Technology (Indian School of Mines) Dhanbaden_US
dc.subjectNanocomposite coatingen_US
dc.subjectAl-Si-N filmen_US
dc.subjectMagnetron sputteringen_US
dc.subjectPh.Den_US
dc.subjectAPHen_US
dc.subjectPH1745en_US
dc.titleDevelopment of hard optically transparent hydrophobic nanocomposite Al-Si-N coatings by magnetron sputteringen_US
dc.typeThesisen_US
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