Micromachining of silicon with excimer laser in air and water medium

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dc.contributor.authorDas, Alok Kumar
dc.contributor.authorSaha, Partha
dc.date.accessioned2018-06-18T10:41:14Z
dc.date.available2018-06-18T10:41:14Z
dc.date.issued2010
dc.identifier.citationInternational Journal of Manufacturing Technology and Management, 2010, V.21(No.1-2),P.42-53en_US
dc.identifier.otherDOI: 10.1504/IJMTM.2010.034285
dc.identifier.urihttp://hdl.handle.net/123456789/1261
dc.language.isoenen_US
dc.publisherInderscienceen_US
dc.subjectLaser micromachiningen_US
dc.subjectKrF excimer laseren_US
dc.subjectLaser fluenceen_US
dc.subjectablationen_US
dc.subjectSilicon micromachiningen_US
dc.subjectSCOPUSen_US
dc.titleMicromachining of silicon with excimer laser in air and water mediumen_US
dc.typeArticleen_US
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