Electron-silane scattering cross section for plasma assisted processes

Verma, PankajKaur, JaspreetAntony, Bobby2018-06-222018-06-222017Physics of Plasmas,2017,V.24,P.033501-1-9http://dx.doi.org/10.1063/1.4976833http://hdl.handle.net/123456789/1329enSilaneElectron impact cross sectionsElectron scatteringSCOP formalismSCIEElectron-silane scattering cross section for plasma assisted processesArticle