Enhancing the dynamic range of mems pressure sensor by optimization of design parameters

Jindal, Sumit Kumar2017-11-222017-11-222017-01http://hdl.handle.net/123456789/876enDesign parametersMems pressure sensorGauge pressurePiezoelectric pressure sensorDiaphragm mechanicsECEPh.DEnhancing the dynamic range of mems pressure sensor by optimization of design parametersThesis