Synthesis and characterization of thin films for micro- electro-mechanical-system devices

Sharma, Nagesh2020-08-282020-08-282020-06http://hdl.handle.net/123456789/1741enMicroelectromechanical systemsLow pressure chemical vapor depositionMIM capacitorAPHPH1550Ph.Dplasma enhance chemical vapor deposition (PECVD) systemsSynthesis and characterization of thin films for micro- electro-mechanical-system devicesThesis