Electron induced collision and ionization of technologically relevant atoms/molecules-a theoretical study

Goswami, Biplab2017-11-152017-11-152014-08http://hdl.handle.net/123456789/636enFusion plasmasLasersMicroelectronics fabricationsTarget modelElectron beam lithographyAPHPh.DElectron induced collision and ionization of technologically relevant atoms/molecules-a theoretical studyThesis