Das, Alok KumarSaha, Partha2018-06-182018-06-182010International Journal of Manufacturing Technology and Management, 2010, V.21(No.1-2),P.42-53DOI: 10.1504/IJMTM.2010.034285http://hdl.handle.net/123456789/1261enLaser micromachiningKrF excimer laserLaser fluenceablationSilicon micromachiningSCOPUSMicromachining of silicon with excimer laser in air and water mediumArticle