Agarwal, Saurabh2022-01-242022-01-242021-11http://hdl.handle.net/123456789/2142enMicro-opto-electro-mechanical-systems (MOEMS)Silicon-On Insulator (SOI)Photonic Crystal (PC)Photonic Crystal WaveguideECEPh.DPH1890Design and modeling of MOEMS photonic crystal waveguide based devicesThesis