Electron induced collision and ionization of technologically relevant atoms/molecules-a theoretical study

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Thesis.pdf (4.28 MB)
Date
2014-08
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Indian Institute of Technology (Indian School of Mines), Dhanbad
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Description
Keywords
Fusion plasmas, Lasers, Microelectronics fabrications, Target model, Electron beam lithography, APH, Ph.D
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http://hdl.handle.net/123456789/636
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B. K . Antony