Electron induced collision and ionization of technologically relevant atoms/molecules-a theoretical study

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dc.contributor.authorGoswami, Biplab
dc.date.accessioned2017-11-15T14:18:17Z
dc.date.available2017-11-15T14:18:17Z
dc.date.issued2014-08
dc.identifier.urihttp://hdl.handle.net/123456789/636
dc.language.isoenen_US
dc.publisherIndian Institute of Technology (Indian School of Mines), Dhanbaden_US
dc.subjectFusion plasmasen_US
dc.subjectLasersen_US
dc.subjectMicroelectronics fabricationsen_US
dc.subjectTarget modelen_US
dc.subjectElectron beam lithographyen_US
dc.subjectAPHen_US
dc.subjectPh.Den_US
dc.titleElectron induced collision and ionization of technologically relevant atoms/molecules-a theoretical studyen_US
dc.typeThesisen_US
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